1. Nānā i ke kūlana ʻenehana holoʻokoʻa o nā LED e pili ana i ke silika

ʻO ka ulu ʻana o nā mea GaN ma nā substrates silika e kū nei i ʻelua mau pilikia ʻenehana nui. ʻO ka mea mua, ʻo ka lattice mismatch a hiki i ka 17% ma waena o ka silicon substrate a me GaN ka hopena i kahi kiʻekiʻe dislocation density i loko o ka mea GaN, e pili ana i ka pono luminescence; ʻO ka lua, aia ka thermal mismatch a hiki i ka 54% ma waena o ka silicon substrate a me GaN, ka mea e hana ai i nā kiʻiʻoniʻoni GaN maʻalahi i ka haki ʻana ma hope o ka ulu ʻana o ka wela kiʻekiʻe a hāʻule i ka lumi wela, e pili ana i ka hua hana. No laila, he mea koʻikoʻi ka ulu ʻana o ka papa pale ma waena o ka substrate silicon a me ke kiʻi ʻoniʻoni ʻoniʻoni GaN. He kuleana ko ka papa pale i ka hōʻemi ʻana i ka nui o ka dislocation i loko o GaN a me ka hoʻēmi ʻana i ka haki ʻana o GaN. I ka laulā nui, ʻo ka pae ʻenehana o ka papa buffer e hoʻoholo ai i ka pono quantum kūloko a me nā hua hana o ka LED, ʻo ia ke kumu a me ka paʻakikī o ke kumu silicon.LED. I kēia manawa, me ka waiwai nui i ka noiʻi a me ka hoʻomohala ʻana mai ka ʻoihana a me ke kula, ua lanakila maoli kēia pilikia ʻenehana.

Hoʻopili ikaika ka substrate silicon i ka mālamalama ʻike ʻia, no laila pono e hoʻoneʻe ʻia ke kiʻi GaN i kahi substrate ʻē aʻe. Ma mua o ka hoʻololi ʻana, hoʻokomo ʻia kahi mea hoʻonaninani kiʻekiʻe ma waena o ke kiʻiʻoniʻoni GaN a me nā mea ʻē aʻe e pale ai i ka mālamalama i hoʻokuʻu ʻia e ka GaN mai ke komo ʻana e ka substrate. ʻIke ʻia ka ʻōnaehana LED ma hope o ka hoʻololi ʻana o ka substrate i ka ʻoihana ma ke ʻano he Thin Film chip. Loaʻa i nā ʻāpana kiʻiʻoniʻoni ʻoniʻoni nā mea maikaʻi ma mua o nā ʻāpana kuʻuna maʻamau e pili ana i ka diffusion o kēia manawa, ka hoʻoili ʻana o ka wela, a me ka ʻano like ʻole.

2. Nānā i ke kūlana noi holoʻokoʻa o kēia manawa a me ka nānā ʻana o ka mākeke o nā LED substrate silicon

ʻO nā LED i hoʻokumu ʻia ʻo Silicon he ʻano kūpaʻa, ka hāʻawi like ʻana i kēia manawa, a me ka hoʻopuʻi wikiwiki ʻana, e kūpono iā lākou no nā noi mana kiʻekiʻe. Ma muli o kāna puka kukui ʻaoʻao hoʻokahi, kuhikuhi maikaʻi, a me ka maikaʻi o ka mālamalama maikaʻi, kūpono loa ia no nā kukui uila e like me ke kukui kaʻa, nā ʻimi ʻimi, nā kukui mining, nā kukui uila uila, a me nā māla kukui kiʻekiʻe me nā koi ʻoi aku ka māmā. .

Ua lilo ka ʻenehana a me ke kaʻina hana o Jigneng Optoelectronics silicon substrate LED. Ma ke kumu o ka hoʻomau ʻana i ka mālama ʻana i nā pono alakaʻi i ke kahua o nā pahu kukui kukui kukui silicon substrate, hoʻomau kā mākou huahana i ka hoʻonui ʻana i nā māla kukui e pono ai ke kukui kuhikuhi a me nā huahana kiʻekiʻe, e like me nā kukui kukui keʻokeʻo LED me ka hana kiʻekiʻe a me ka waiwai hoʻohui. , Nā kukui uila uila LED, nā kukui kaʻa LED, nā kukui alanui LED, nā kukui LED, a me nā mea'ē aʻe, e hoʻokumu mālie i ke kūlana maikaʻi o nā'āpana LED silicon substrate i kaʻoihana māhele.

3. Ka wanana o ka ulu ana o ke kilikaki substrate LED

ʻO ka hoʻomaikaʻi ʻana i ka māmā māmā, hōʻemi i nā kumukūʻai a i ʻole nā ​​​​kumukūʻai he kumuhana mau loa i kaʻoihana LED. Pono e hoʻopili ʻia nā ʻāpana kiʻi ʻoniʻoni ʻoniʻoni silikoni ma mua o ka hiki ke hoʻohana ʻia, a ʻo ke kumukūʻai o ka hōʻike ʻana i nā moʻokāki no ka hapa nui o ke kumukūʻai noi LED. Hoʻokuʻu i ka ʻeke kuʻuna a hoʻopili pololei i nā ʻāpana ma ka wafer. I nā huaʻōlelo ʻē aʻe, hiki i ka chip scale packaging (CSP) ma ka wafer ke hoʻokuʻu i ka hopena o ka pahu a komo pololei i ka hopena noi mai ka hopena chip, e hōʻemi hou ana i ke kumukūʻai noi o LED. ʻO CSP kekahi o nā manaʻo no nā LED e pili ana i ka GaN ma ke silika. Ua hōʻike ʻia nā hui honua e like me Toshiba a me Samsung i ka hoʻohana ʻana i nā LED silicon no CSP, a ua manaʻo ʻia e loaʻa koke nā huahana pili i ka mākeke.

I nā makahiki i hala iho nei, ʻo kahi wahi wela ʻē aʻe i ka ʻoihana LED ʻo Micro LED, ʻike ʻia hoʻi ʻo LED level micrometer. ʻO ka nui o nā Micro LED mai kahi mau micrometers a hiki i ʻumi micrometers, kokoke i ka pae like me ka mānoanoa o nā kiʻi ʻoniʻoni lahilahi GaN i ulu ʻia e ka epitaxy. Ma ka pālākiō micrometer, hiki ke hana pololei ʻia nā mea GaN i GaNLED i hoʻonohonoho pono ʻia me ka ʻole o ke kākoʻo. ʻO ia hoʻi, i ke kaʻina hana o ka hoʻomākaukau ʻana i nā Micro LED, pono e wehe ʻia ka substrate no ka ulu ʻana o GaN. ʻO kahi pōmaikaʻi kūlohelohe o nā LED e pili ana i ke silika ʻo ia ka hiki ke hoʻoneʻe ʻia ka substrate silicon e ka etching chemical wet etching wale nō, me ka ʻole o ka hopena i ka mea GaN i ka wā o ka wehe ʻana, e hōʻoia ana i ka hua a me ka hilinaʻi. Mai kēia hiʻohiʻona, ua paʻa ʻia ka ʻenehana LED substrate silika e loaʻa kahi wahi ma ke kahua o nā Micro LED.